Waferpedia

Tool family

Temescal TES 900

TemescalDeposition1 entry

The Temescal TES 900 is a vertical-process sputtering system with a dual-level load lock and a 12" x 12" pallet substrate carrier.

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Models in this family

  1. TES 900

    The Temescal TES 900 is a vertical-process sputtering system with a dual-level load lock and a 12" x 12" pallet substrate carrier.