Tool family
The TES 600 is a horizontal-process sputtering system featuring a dual-level load lock, pallet handling of 12" x 12" substrates, up to three 5" x 15" magnetron cathodes, and deposition uniformity of +/-5%.
The TES 600 is a horizontal-process sputtering system featuring a dual-level load lock, pallet handling of 12" x 12" substrates, up to three 5" x 15" magnetron cathodes, and deposition uniformity of +/-5%.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TES 900 | — | — | Vertical process chamber (as opposed to horizontal for TES 600) | tescal.com[1] |