Waferpedia

Tool family

Tegal Tegal 903

TegalEtch1 entry

The Tegal 903 is an etcher in the Tegal 9XX Series Etchers.

Models in this family

  1. The Tegal 903 is an etcher in the Tegal 9XX Series Etchers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Tegal 903e Table Top, Upgraded——Table Top, Upgraded variant of the Tegal 903legacysemi.com[1]
    Tegal 903e Direct Cooled TTW, Standard——Direct Cooled TTW, Standard variant of the Tegal 903legacysemi.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]legacysemi.comlegacysemi.com