Tool family
The SUSS PA 300 is a wafer prober from SUSS MicroTec.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PA 300 Control | — | — | CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck. | waferpedia.com[1] |
| PA 300 ProbeShield Probing | — | — | Probingsstation configured with a 12-inch nickel plated aluminum chuck, ATT M300 control unit, Cascade CMPS-888 microscope, and SUSS PH150 micropositioners. | waferpedia.com[1] |
The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.
The SUSS PA 300 ProbeShield Probing Station is a probing station configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.
The SUSS PA 300 is a wafer prober from SUSS MicroTec.
The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.
The SUSS PA 300 ProbeShield Probing Station is a probing station configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.