Waferpedia

Tool family

SUSS MicroTec PA 300

Models in this family

  1. The SUSS PA 300 is a wafer prober from SUSS MicroTec.

    Cited variants

    DesignationGenerationVintageChangesSource
    PA 300 Control——CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.waferpedia.com[1]
    PA 300 ProbeShield Probing——Probingsstation configured with a 12-inch nickel plated aluminum chuck, ATT M300 control unit, Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.waferpedia.com[1]
  2. The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.

  3. The SUSS PA 300 ProbeShield Probing Station is a probing station configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.

All entries

  1. PA 300SUSS MicroTec

    The SUSS PA 300 is a wafer prober from SUSS MicroTec.

    CategoryTest & Probe
    2 specs
  2. PA 300 ControlSUSS MicroTec

    The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.

    CategoryCMP
    16 specs
  3. PA 300 ProbeShield ProbingSUSS MicroTec

    The SUSS PA 300 ProbeShield Probing Station is a probing station configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.

    CategoryTest & Probe
    13 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com