Tool family
The MA / BA Gen4 Pro Series is a semi-automated mask aligner and bond aligner system supporting wafers up to 150 mm / 200 mm, with capabilities for exposure, UV bonding, fusion bonding, micro- and nanoimprinting, and selective plasma activation.
The MA / BA Gen4 Pro Series is a semi-automated mask aligner and bond aligner system supporting wafers up to 150 mm / 200 mm, with capabilities for exposure, UV bonding, fusion bonding, micro- and nanoimprinting, and selective plasma activation.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| BA8 Gen4 Pro | Gen4 | — | Also available as BA8 Gen4 Pro configuration | hilpert.ch[1] |