Waferpedia

Tool family

Seren HR 601

Seren1 entry

Seren HR 601 RF Generator.

Models in this family

  1. The Seren HR 601 is an RF generator with a 600 W output at 13.56 MHz.

    Cited variants

    DesignationGenerationVintageChangesSource
    HR601 60MHz——60.00 MHz frequency, input power 200-240 VAC, dimensions 5.22" x 9.47" x 20.09"serenips.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]serenips.comserenips.com