Tool family
SCREEN SU 3100 Wafer
SCREEN SU 3100 Wafer Cleaner.
Models in this family
The SCREEN SU 3100 is a wafer cleaner from SCREEN/DNS, configured with 8 chambers (8ch) and 4 FOUP load ports, and known to have specific documented failure modes.
Tool family
SCREEN SU 3100 Wafer Cleaner.
The SCREEN SU 3100 is a wafer cleaner from SCREEN/DNS, configured with 8 chambers (8ch) and 4 FOUP load ports, and known to have specific documented failure modes.
