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Tool family

Oxford Instruments IBD

Oxford InstrumentsDeposition1 entry

Oxford Instruments IBD Chamber.

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Models in this family

  1. IBD

    The Oxford IBD is an ion beam deposition system.

    Cited variants

    DesignationGenerationVintageChangesSource
    Oxford IBD Chamber (Ion Beam Deposition) with hollow cathode DC ion source——Listed with a hollow cathode DC ion source.Equipment inventory listing[1]
    Oxford IBD Chamber (Ion Beam Deposition) with RF gridded ion source——Listed with an RF gridded ion source.Equipment inventory listing[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing