Waferpedia

Tool family

Onto Innovation NSX

Models in this family

  1. Onto Innovation NSX is an auto visual inspection (AVI) equipment model.

  2. The ONTO / Rudolph / August NSX 100 is an inspection system.

  3. The Onto / Rudolph / August NSX 320 is an inspection system described as a single-phase unit rated for 200-240 V, 50/60 Hz, with a full load current of 40 A.

    Cited variants

    DesignationGenerationVintageChangesSource
    NSX 320 Wafer Level Packaging Metrology System——For transparent film thickness measurements.f.machineryhost.com[1]
    NSX 320 Advanced Wafer Level Packaging Metrology System——For height and transparent film thickness measurements.f.machineryhost.com[1]
    NSX 320 TSV Metrology System——For via depth and wafer thickness measurements.f.machineryhost.com[1]
  4. The NSX 95 is an ONTO / Rudolph / August AVI (Auto Visual Inspection) equipment model.

All entries

  1. NSXOnto Innovation

    Onto Innovation NSX is an auto visual inspection (AVI) equipment model.

    CategoryMetrology & Inspection
  2. NSX 100Onto Innovation

    The ONTO / Rudolph / August NSX 100 is an inspection system.

    CategoryMetrology & Inspection
    6 specs
  3. NSX 320Onto Innovation

    The Onto / Rudolph / August NSX 320 is an inspection system described as a single-phase unit rated for 200-240 V, 50/60 Hz, with a full load current of 40 A.

    CategoryMetrology & Inspection
    15 specs
  4. NSX 95Onto Innovation

    The NSX 95 is an ONTO / Rudolph / August AVI (Auto Visual Inspection) equipment model.

    CategoryMetrology & Inspection
    10 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]f.machineryhost.comf.machineryhost.com