Tool family
Onto Innovation IVS 280 System
The Onto Innovation IVS 280 System provides overlay, CD, and height metrology for 100mm to 200mm wafers in compound semiconductor, power devices, RF, MEMS, and LED markets.
Models in this family
The Onto Innovation IVS 280 System provides overlay, CD, and height metrology for 100mm to 200mm wafers in compound semiconductor, power devices, RF, MEMS, and LED markets.
