Waferpedia

Tool family

Novellus 3290

NovellusDeposition2 entries

Models in this family

  1. The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Novellus / Varian 3290 STQ——A sputtering system designed for 6-inch wafers.waferpedia.com[1]
  2. The Novellus / Varian 3290 STQ is a sputtering system designed for 6-inch wafers.

All entries

  1. 3290Novellus

    The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

    CategoryDeposition
    5 specs
  2. 3290 STQNovellus

    The Novellus / Varian 3290 STQ is a sputtering system designed for 6-inch wafers.

    CategoryDeposition
    25 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com