Tool family
The Nikon Scanner 203 B is a stepper/scanner from 1999, supporting 6-inch and 8-inch wafers with a 0.18um resolution.
The Nikon Scanner 204 B is a Nikon-made lithography stepper that supports 6-inch and 8-inch wafers and is specified at 0.15 µm.
The Nikon Scanner 203 B is a stepper/scanner from 1999, supporting 6-inch and 8-inch wafers with a 0.18um resolution.
The Nikon Scanner 204 B is a Nikon-made lithography stepper that supports 6-inch and 8-inch wafers and is specified at 0.15 µm.