Waferpedia

Tool family

MPI TS 3000

MPI1 entry

Models in this family

  1. The MPI TS 3000 is a 300 mm automated probe system for on-wafer applications. The MPI TS 3000 supports DC-IV, DC-CV, pulsed-IV, RF, mmW, load-pull, and failure-analysis use cases.

    Cited variants

    DesignationGenerationVintageChangesSource
    TS 3000-SE——Described for IV, CV, pulsed-IV, 1/f, and RF measurements; includes ShielDEnvironment, NoiseShield, and thermal-chuck options for wide temperature-range use.mpi.com.tw[1]
    TS 3000-HP——Described for high-voltage and high-current applications up to 10 kV and 600 A, with dedicated high-power probes and anti-arcing options.mpi-corporation.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]mpi.com.twmpi.com.tw
  2. [2]mpi-corporation.commpi-corporation.com