Waferpedia

Tool family

Laurell H6-23 B

LaurellResist Processing1 entry

The Laurell H6-23 B is a Spin Coater in the 650-series. The Laurell H6-23 B accepts a maximum substrate size of ø 150mm (5" × 5") and is rated to 12000 rpm.

LinkedIn X Email

Models in this family

  1. H6-23 B

    The Laurell H6-23 B is a Spin Coater in the 650-series. The Laurell H6-23 B accepts a maximum substrate size of ø 150mm (5" × 5") and is rated to 12000 rpm.