Tool family
KLA Surfscan SP 1 DLS BSIM Particle Defect
Models in this family
The KLA Surfscan SP1 DLS (also referred to as SP 1 DLS BSIM) is a particle defect inspection system introduced in 2004, configured for 200/300mm wafers.
Tool family
The KLA Surfscan SP1 DLS (also referred to as SP 1 DLS BSIM) is a particle defect inspection system introduced in 2004, configured for 200/300mm wafers.
