KLA Surfscan 6400

Models in this family

1. Surfscan 6400

   The KLA Surfscan 6400 is an unpatterned bare-wafer surface defect and particle inspection system.

2. 

   Surfscan 6400 Film Surface Analysis

   The KLA Surfscan 6400 Film Surface Analysis is a metrology and inspection system for film surface analysis, supporting 200mm wafers.

3. 

   Surfscan 6400 Particle Defect

   The KLA Surfscan 6400 Particle Defect is an unpatterned wafer surface particle inspection system for bare wafer surface defect inspection.

4. Surfscan 6400 Refurbishment Services

   KLA Surfscan 6400 Refurbishment Services is a refurbishment-only offering for a client system.