Waferpedia

Tool family

KLA OP 5240

KLALithography2 entries
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Models in this family

  1. OP 5240 Film Thickness Measurement

    The KLA / Therma-wave OP 5240 is a film thickness measurement system for 6-inch and 8-inch wafers.

  2. OP 5240 I

    The KLA / Therma-wave OP 5240 I is a metrology and inspection tool from the KLA OP 5240 family.

All entries

  1. OP 5240 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 5240 is a film thickness measurement system for 6-inch and 8-inch wafers.

    CategoryLithography
    11 specs
  2. OP 5240 IKLA

    The KLA / Therma-wave OP 5240 I is a metrology and inspection tool from the KLA OP 5240 family.

    CategoryMetrology & Inspection
    5 specs