Waferpedia

Tool family

KLA OmniMap

KLA6 entries

Models in this family

  1. The KLA OmniMap Auto RS 55 is a resistivity mapper.

  2. The KLA OmniMap Auto RS 75 is a resistivity mapper.

  3. The KLA OmniMap RS 200 + Resistivity Mapper is an 8-inch wafer resistivity mapper from the KLA OmniMap family.

  4. The KLA OmniMap RS 55 TCA Resistivity Mapper is a resistivity measurement tool for 8-inch wafers with a KLA H2D robot and software version ST-6.50.

All entries

  1. OmniMap Auto RS 55 Resistivity MapperKLA

    The KLA OmniMap Auto RS 55 is a resistivity mapper.

    7 specs
  2. OmniMap Auto RS 75 Resistivity MapperKLA

    The KLA OmniMap Auto RS 75 is a resistivity mapper.

    CategoryMetrology & Inspection
    9 specs
  3. OmniMap Auto RS 75 tcKLA
    CategoryMetrology & Inspection
    12 specs
  4. OmniMap RS 200 + Resistivity MapperKLA

    The KLA OmniMap RS 200 + Resistivity Mapper is an 8-inch wafer resistivity mapper from the KLA OmniMap family.

    6 specs
  5. OmniMap RS 55 TCA Resistivity MapperKLA

    The KLA OmniMap RS 55 TCA Resistivity Mapper is a resistivity measurement tool for 8-inch wafers with a KLA H2D robot and software version ST-6.50.

    7 specs
  6. OmniMap RS 75 Resistivity MapperKLA
    3 specs