KLA INS 3000

Models in this family

1. 

   INS 3000

   The KLA / Leica INS 3000 is an automated optical defect review system for 200mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   INS 3300	—	—	Automated optical defect review system for 300mm wafers with UV and DUV optics, higher throughput.	web.archive.org[1]

2. 

   INS 3000 DUV Defect

   KLA / Leica INS 3000 is an 8-inch DUV defect inspection system used for wafer transport check and related inspection checks.

3. 

   INS 3000 Macro Defect

   The INS 3000 Macro Defect is an inspection system in the metrology and inspection category, used for automated optical detection of surface-level macro defects on semiconductor wafers.

4. 

   INS 3000 Optical

   The INS 3000 is an optical inspection station with a fully automatic integrated microscope including UV and confocal, a universal wafer handler, front-loading cassette capacity for 1 to 3 cassettes including SMIF, and a Windows NT based graphical user interface.

Sources