Waferpedia

Tool family

Edwards IGX 100 M

Edwards1 entry

Models in this family

  1. The Edwards iGX 100 M is a dry vacuum pump from the iGX series designed for semiconductor applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    iGX100M 200–230V——Voltage variant: 200–230 V, 50/60 Hz, part number A54612958idealvac.com[1]
    iGX100M 380–460V——Voltage variant: 380–460 V, 50/60 Hz, part number A54612959idealvac.com[1]
    iGX100M SS——Stainless steel construction, 200–230 V, 50/60 Hz, part number A53612958ptbsales.com[2]
    iGX100MTI——Ti variant (specific differences not stated), 200–230 V, 50/60 Hz, part number A54648958idealvac.com[1]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]ptbsales.comptbsales.com