Waferpedia

Tool family

ASM A 412 Dual Reactor

ASM1 entry

Models in this family

  1. The ASM A 412 Dual Reactor is a semiconductor processing tool used for deposition of nitride or doped polysilicon.

    Cited variants

    DesignationGenerationVintageChangesSource
    A 412 Dual Reactor - Doped Poly——Configured for doped poly depositionEquipment inventory listing[1]
    A 412 Dual Reactor - Nitride——Configured for nitride depositionEquipment inventory listing[2]
    ASM A 412 Dual Reactor - Doped Poly——Configured for doped poly depositionEquipment inventory listing[1]
    ASM A 412 Dual Reactor - Nitride——Configured for nitride depositionEquipment inventory listing[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing