Tool family
The Advanced Energy Apex is a family of RF generators and power-delivery systems with high power density and compact design for plasma-based thin-film processes.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 1.5 kW | — | — | Dimensions: 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D); RF output power 1.5 kW into 50 Ω non-reactive load. | advancedenergy.com[1] |
| 3 kW | — | — | Dimensions: same as 1.5 kW model; RF output power 3 kW into 50 Ω non-reactive load. | advancedenergy.com[1] |
| 5.5 kW | — | — | Dimensions: same as 1.5 kW model; RF output power 5.5 kW into 50 Ω non-reactive load. | advancedenergy.com[1] |
| 10 kW | — | — | Dimensions: 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D) (3U 19" rack); RF output power 10 kW into 50 Ω non-reactive load. | advancedenergy.com[1] |
| 1.5 kW model | — | — | Lower power model with half-rack form factor. | advancedenergy.com[1] |
| 3 kW model | — | — | Mid power model with half-rack form factor. | advancedenergy.com[1] |
| 5.5 kW model | — | — | Higher power model with half-rack form factor. | advancedenergy.com[1] |
| 10 kW model | — | — | Highest power model with full 19-inch rack form factor. | advancedenergy.com[1] |