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Comparison ledger

0216 7696, E 11368072 ESCversusViision 80 Ion

Varian 0216 7696, E 11368072 ESC, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 0216 7696, E 11368072 ESCVarian Viision 80
Cited variants—
  • Viision 80 High Current[1]
Specifications
ConfigurationPlaten ADV-S Type[2]5 Wire[4]
TypeESC Platen ADV-S Type[2]High Current[1]
CategoryIon Implantation[3]—
Phase—3 Phase[4]
Voltage—208 V[1]
Power—35 kVA[1]
Electrical phase—3 Phase[4]
Electrical wires—5 Wire[4]
Voltage range—200-230 Vac[5]
Frequency—50/60 Hz[4]
Maximum current—50 A[1]
Full load current—95 Amps[1]
High current—Yes[1]
Wiring—5 Wire[4]
Current—95 Amps[1]
Max Current—50 A[1]
OEM—Varian[4]
Model—Viision 80[4]
Equipment type—Ion Implanter[4]
Electrical configuration—3 Phase - 5 Wire - 208 Volts - 50/60 Hz[4]
Vintage—1997[4]
Current class—High Current[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]inventory listing