Comparison ledger
Ultratech 1000 Family, Ultratech LSA 100 A Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | LSA 100 A WaferUltratech |
|---|---|---|
| OEM | Ultratech | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech 1000 Family | Ultratech LSA 100 A Wafer |
| Specifications | ||
| Tool type | Photolithography step-and-repeat 1X stepper[1] | Wafer Stepper[2] |
| Optical design | Wynne Dyson[1] | — |
| Magnification | 1X[1] | — |
| Configuration | — | Laser Spike Anneal (LSA)[2] |
| Voltage | — | 115 VAC / 1 Phase / 50/60 Hz[3] |
| Optics | — | Laser Spike Anneal (LSA)[3] |
| Power | — | 115 VAC / 1 Phase / 50/60 Hz[3] |
| Current | — | 15 Amps FLA / 6 Amps Largest Load[3] |
| Included module | — | Laser[3] |
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