Comparison ledger
Semitool 421 Scepter Spray Solvent, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 421 Scepter Spray SolventSemitool | 1000PYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Batch Solvent Processor for Wafer Cleaning | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 421 | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Wafer size | Batch Solvent Processor for Wafer Cleaning[2] | — |
| Configuration | Max Substrate Size of 8”/200mm[2] | Parallel plate[6] |
| Maximum substrate size | 200 mm (8 inch)[2] | — |
| Batch capacity | Up to 50 wafers[3] | — |
| Chamber type | Single chamber[3] | — |
| Automation level | Semi-automated[3] | — |
| Number of tanks | 4 stainless steel (2 heated, 2 ambient)[4] | — |
| Process applications | Polymer removal, resist stripping, wafer cleaning, metal lift-off[4] | — |
| OEM model number | SST-421[4] | — |
| Also known as | Scepter Spray Solvent Tool (SST)[2] | — |
| Maximum wafer count per batch | 50 wafers[2] | — |
| Number of heated tanks | 2[4] | — |
| Rotor included | 1 rotor (select size at time of order)[4] | — |
| Touch screen | Class 1 Touch Screen Monitor[1] | — |
| Pumps | Pneumatic pumps, Trebor 610 back[1] | — |
| Model | — | 1000P[5] |
| System type | — | Plasma cleaning system[5] |
| Shelf configuration | — | Four 16 x 16 inch shelves[5] |
| Total capacity | — | 1024 square inches[5] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[5] |
| Number of shelves | — | 4[5] |
| Shelf size | — | 16 x 16 inches[5] |
| Power | — | 1000 W[6] |
| Operation modes | — | Active, RIE, Downstream[5] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[5] |
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