Waferpedia

Comparison ledger

11600 SRDversus304 SST Batch Wafer Processing

Semitool 11600 SRD, Wafab 304 SST Batch Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSemitoolWafab
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDWafab 304 SST Batch Wafer Processing
Specifications
ConfigurationCeramic[1]96"[2]
ManufacturerSemitool[1]—
Model11600 SRD[1]304 SST[2]
Equipment typeSpin Rinse Dryer[1]—
Make—Wafab[2]
Wafer size—6 inch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing