Waferpedia

Comparison ledger

11600 SRDversusSymphony 2300 Spray Acid

Semitool 11600 SRD, Semitool Symphony 2300 Spray Acid, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSemitoolSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDSemitool Symphony 2300 Spray Acid
Specifications
ConfigurationCeramic[1]1 Chamber[2]
ManufacturerSemitool[1]—
Model11600 SRD[1]—
Equipment typeSpin Rinse Dryer[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing