Waferpedia

Comparison ledger

SU 3100 Waferversus1000FP

SCREEN SU 3100 Wafer, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSCREENYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SU 3100 WaferYES 1000FP
Specifications
Configuration8ch[1]—
StatusFailure on Part: MPC2 Shutter Plate Rotation Motor – Alarm[1]—
Vintage2010[1]—
HDD StatusNo HDD[1]—
ModelSU 3100[1]Glen/YES 1000FP[3]
MakeSCREEN / DNS[1]—
Number of Chambers8[2]—
Number of FOUP Load Ports4[2]—
HDDNo HDD[1]—
System type—Plasma cleaning system[3]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[3]
Designed use—Designed to accept a range of shelf sizes[3]
Application focus—Changing needs of the flat panel industry[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org