Waferpedia

Comparison ledger

SS 80 BW AR Waferversus11600 SRD

SCREEN SS 80 BW AR Wafer, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSCREENSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SS 80Semitool 11600 SRD
Specifications
SoftwareSYS Ver 394 F[1]—
Configuration2 Reverser[1]Ceramic[2]
Chuck Type/ MaterialStainless Steel / Teflon, Nylon[1]—
MFC5 Horiba SEC 4600[1]—
Robot TypeDNS[1]—
Manufacturer—Semitool[2]
Model—11600 SRD[2]
Equipment type—Spin Rinse Dryer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing