Comparison ledger
Santa Clara Plastics SCP 9400 Batch Wafer Processing, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SCP 9400 Batch Wafer ProcessingSanta Clara Plastics | 1000FPYES |
|---|---|---|
| OEM | Santa Clara Plastics | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Santa Clara Plastics SCP | YES 1000FP |
| Specifications | ||
| Configuration | RCA Clean[1] | — |
| Manufacturer | Santa Clara Plastics[1] | — |
| Model | SCP 9400[1] | Glen/YES 1000FP[4] |
| Equipment name | SCP 9400 Batch Wafer Processing[1] | — |
| Category | Wet Processing / Clean[2] | — |
| Wafer size | 8 inch[1] | — |
| Tool type | batch wafer processing system[2] | — |
| Process description | 8-inch RCA clean tool[2] | — |
| Current equipment status | Available[3] | — |
| Current configuration | 200mm[3] | — |
| Date of manufacture | 1998-03-16[3] | — |
| Description | Wet hood[3] | — |
| Software | Sys 4000 Ver 9.8.1 Patch A[3] | — |
| System type | — | Plasma cleaning system[4] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[4] |
| Designed use | — | Designed to accept a range of shelf sizes[4] |
| Application focus | — | Changing needs of the flat panel industry[4] |
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