Comparison ledger
OAI 200, SUSS MicroTec MA 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200OAI | MA 6 MaskSUSS MicroTec |
|---|---|---|
| OEM | OAI | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | OAI 200 | SUSS MicroTec MA 6 Mask |
| Specifications | ||
| OEM | OAI[2] | — |
| Model | 200[2] | MA 6[10] |
| Tool owner | Brian Baker[2] | — |
| Serial number | 1213[2] | — |
| Location | Bay B[3] | — |
| Substrate size accommodation | up to 6"x6"[4] | — |
| Mask size accommodation | 2"x2" to 7"x7"[4] | — |
| Maximum mask size (datasheet) | up to 9"x9"[5] | — |
| Alignment precision | 1 micron[6] | — |
| Vacuum Chuck X, Y travel | ±0.47" (12mm)[4] | — |
| Vacuum Chuck Z travel | ±0.12" (3mm)[4] | — |
| Vacuum Chuck rotation | ±7°[4] | — |
| Substrate Stage X, Y travel (datasheet) | ±10mm[5] | — |
| Z travel (datasheet) | 1500 microns[5] | — |
| Rotation (datasheet) | ±3.5°[5] | — |
| Lamp power range | 200W to 2000W[6] | — |
| UV wavelength range | Near or Deep UV (220nm to 436nm)[4] | — |
| Exposure intensity control | ±2% of desired intensity[6] | — |
| Timer range | 0-1000 seconds in 1 second intervals[4] | — |
| Dimensions (width) | 31 inches[4] | — |
| Dimensions (height) | 37 inches (datasheet: 37")[5] | — |
| Weight | 250 lbs[5] | — |
| Configuration | — | 1000 Watt Power Supply[7] |
| Voltage | — | 230 V[8] |
| UV lamp power supply | — | CIC1200/157308LS[9] |
| Wafer Sizes | — | 2, 3, 4, 5, 6, 12 inch[8] |
| Resolution | — | 1 Micron on 6 inch wafers[7] |
| Power Supply | — | 1000 Watt[7] |
| Illumination | — | IR Back Side Illumination[7] |
| Microscope | — | Split Field Microscope with 6 Objectives[7] |
| Alignment | — | Infrared Alignment[8] |
| Topside Alignment Objectives | — | MplanFL N 5x/0.15, MplanFL N 10x/0.30, LMPlanFL N 20x/0.40[9] |
| Air Chuck | — | 7-inch[9] |
| Voltage / Frequency | — | 200-240V, 50/60Hz[9] |
| Make | — | SUSS[10] |
| Product Details | — | up to 6" - 50/60 Hz - 230 V - HDD - Software - with Infrared Alignment - No BSA 2001 Vintage[8] |
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