Waferpedia

Comparison ledger

1 WBS 1 Wafer SubstrateversusSB8E

Logitech 1 WBS 1 Wafer Substrate, SUSS MicroTec SB8E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SB8ESUSS MicroTec
OEMLogitechSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Windows NT
Generation——
FamilyLogitech 1 WBS 1 Wafer SubstrateSUSS MicroTec SB8E
Specifications
Wafer Size6 inch[1]—
Tool type—VAC substrate bonder[2]
Maximum wafer size—up to 150mm[2]
Vacuum level—down to 5x10e-5 mbar[2]
Overpressure—up to 3 bar[2]
Bonding processes—Anodic Bonding, Silicon Fusion Bonding, Adhesive Bonding, Thermal Compression Bonding[2]
Heating—Double-side heating up to 550 Degrees Celsius[2]
Power supply—0 to +/- 2000 VDC with maximum current at 15mA[2]
Control software platform—Windows NT[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]cnfusers.cornell.educnfusers.cornell.edu