Waferpedia

Comparison ledger

72versus72 Continuous

Lapmaster 72, Lapmaster 72 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
72Lapmaster
72 ContinuousLapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 72Lapmaster 72
Cited variants
  • Model 72 Open Face Flat Polishing Machine[1]
  • Model 72 Polisher[2]
  • 72" Lapmaster, Open-Face, (4) 27" ID Rings, 5-32 RPM, 25HP, Slurry System, 2001[3]
  • Open Face (OF)[4]
  • Pneumatic Lift (PL)[4]
  • Model 72 Open Face[4]
  • Model 72 Pneumatic Lift[1]
—
Specifications
Configuration27" ID Rings[2]—
Voltage480 V[2]—
Plate Diameter72 inches (1829 mm)[4]—
Number of Conditioning Rings4[1]—
Ring Inside Diameter27.25 inches (692 mm)[4]—
Standard RPM30[4]—
RPM Range (Variable Speed Drive)5–32[4]—
Drive Motor (Lapper)20 HP / 15 kW[4]—
Drive Motor (alternate listing)25 HP[3]—
Working Height36 inches (914 mm)[4]—
Dimensions (Open Face)100 inches x 110 inches x 63 inches (2540 mm x 2794 mm x 1600 mm)[4]—
Dimensions (Pneumatic Lift)124 inches x 110 inches x 108 inches (3150 mm x 2794 mm x 2743 mm)[4]—
Est. Shipping Weight (Open Face)15,000 lbs (6804 kg)[4]—
Est. Shipping Weight (Pneumatic Lift)20,000 lbs (9072 kg)[4]—
Ring Height4.0 inches[3]—
Plate Thickness1-5/8 inches[3]—
Model72[2]—
Machine typePolisher[2]—
Plate diameter72 in[4]—
Conditioning rings4[1]—
Ring ID27.25 in[4]—
Ring size27" ID rings[2]—
Speed range5-32 RPM[2]—
RPM range with variable speed drive5-32[4]—
Drive motor25 HP[2]—
VersionOpen Face[1]—
Overall dimensions, Open Face100 in x 110 in x 63 in H[4]—
Weight, Open Face15,000 lbs[4]—
Serial number7200010[3]—
Year stated in source2001[3]—
Phase—3 Phase[5]
Frequency—60 Hz[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]lapmaster-wolters.co.uklapmaster-wolters.co.uk
  2. [2]Equipment inventory listing
  3. [3]libertymachinery.comlibertymachinery.com
  4. [4]web.archive.orgweb.archive.org
  5. [5]inventory listing