Waferpedia

Comparison ledger

IPEC AvantGaard 776 Tungstenversus120 Continuous

Lam Research IPEC AvantGaard 776 Tungsten, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMLam ResearchLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC AvantGaard 776 TungstenLapmaster 120 Continuous
Specifications
MakeLam / IPEC[1]—
ModelAvantGaard 776 Tungsten[1]—
Wafer Size8 inch[1]—
ProcessTungsten[1]—
CategoryCMP[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing