Comparison ledger
Lam Research Gasonics VHP Horizontal, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics VHP HorizontalLam Research | |
|---|---|---|
| OEM | Lam Research | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 80 A[1] | — |
| Voltage | 480 V[1] | — |
| Frequency | 60 Hz[1] | — |
| Tool type | Horizontal furnace[1] | — |
| Wafer size | 8 inch[2] | — |
| Version | 200 mm[3] | — |
| Electrical ratings | 3 Phase - 80 A - 480 V - 60 Hz[1] | — |
| OEM / Branding | Lam / Novellus / Gasonics[1] | — |
| Model | VHP[1] | — |
| Type | Horizontal Furnace[1] | — |
| Wafer Size (metric) | 200 mm[3] | — |
| Electrical Supply | 3 Phase, 480 V, 80 A, 60 Hz[1] | — |
| Electrical rating | 3 Phase, 80 A, 480 V, 60 Hz[1] | — |
| Asset Number | — | 142841[4] |
| Last Confirm Date | — | October 14, 2025[5] |
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