Comparison ledger
KLA AIT XUV, KLA AIT XUV Darkfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AIT XUVKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2004 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA AIT XUV | KLA AIT XUV |
| Specifications | ||
| Configuration | Broken items:[1] | Pillar[5] |
| Laser wavelength | 364 nm[3] | — |
| Controller | APS4[2] | — |
| Equipment type | Inspection machine[1] | — |
| Make | KLA[1] | — |
| Model | AIT XUV[1] | AIT XUV[4] |
| Laser head | UV laser head, AIT, 364 nm[3] | — |
| Known broken items | Optical light bulb; laser channel 2[1] | — |
| Software Version | — | 6.3.24.3[4] |
| CIM | — | SECS / GEM[4] |
| Factory System | — | FOUPS[4] |
| Handler System | — | Robot[5] |
| Missing Parts | — | Incomplete Wafer Handler Module & Inspection Module[4] |
| Category | — | Metrology & Inspection[6] |
| Wafer Size | — | 12 inch[6] |
| Vintage | — | 2006[6] |
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