Comparison ledger
KLA .496 PSL Wafer, Leica D800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D800Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Leica D800 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| equipment type | — | optical microscope[3] |
| Type | — | Standard optical microscope[3] |
| Illumination | — | LED illumination[3] |
| Objectives | — | 5 objectives: 5x, 10x, 20x, 50x, 100x[3] |
| Imaging modes | — | Brightfield (BF), darkfield (DF), DIC[3] |
| Options | — | Oblique illumination; infrared (IR) backside illumination[3] |
| Software | — | LAS-X UI software[3] |
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