Comparison ledger
KLA 1007, MPI TS150, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | TS150MPI |
|---|---|---|
| OEM | KLA | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | MPI TS150 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Maximum independent terminals | — | 4 independent terminals plus additional chuck grounding[3] |
| Wafer size compatibility | — | up to 6 inch[3] |
| Chuck stage | — | Fine-glide chuck stage on highly stable granite base[3] |
| X-Y travel range | — | 150 mm x 150 mm coarse and 10 mm x 10 mm fine[3] |
| Optics | — | Binocular optics with oculars or microscope view on monitor[3] |
| Illumination | — | Selectable 4 quadrants LED illumination[3] |
| Probe positioners | — | True X,Y,Z micro-positioners (MPI PM100)[3] |
| Probe tips | — | Interchangeable tungsten contact tips; two different diameters available[3] |
| Measurement capability | — | Designed for electrical testing on wafers or chips[3] |
| Maximum terminals | — | 4 independent terminals + additional chuck grounding[3] |
| Chuck compatibility | — | wafer sizes up to 6 inch, chip or part of wafers[3] |
| Stage type | — | Fine-glide chuck stage on highly stable granite base[3] |
| X-Y travel range (coarse) | — | 150mm x 150mm[3] |
| X-Y travel range (fine) | — | 10mm x 10mm[3] |
| Probe micro-positioners | — | MPI PM100 true X,Y,Z micro-positioners with interchangeable tungsten (W) contact tips (two different diameter available)[3] |
| Additional electrical connection | — | to the chuck for conductive substrates[3] |
| DC measurement unit | — | Agilent 4155C Semiconductor Parameter Analyzer with 4x Medium-power SMU, 2xVSU and 2xVMU[3] |
| DC voltage and current capability | — | +/- 40 Volts and +/- 100 mA measurement unit (SMU)[3] |
| DC measurement resolution | — | 10 femtoamp and 0.2 microvolt[3] |
| Switching box configurations | — | 6 configuration options for standard applications such as FET, bipolar transistors, diodes, 2-points and 4-points general measurements[3] |
| DC software | — | Desktop EasyEXPERT software for PC-based GUI instrument control[3] |
| AC measurement unit | — | Zürich Instruments MFIA multi-frequency impedance analyzer[3] |
| AC signal frequency | — | DC to 5 MHz[3] |
| AC signal voltage | — | 0 to 2.1 V RMS[3] |
| DC bias (2 probes) | — | +/- 10 Volts[3] |
| DC bias (4 probes) | — | +/- 3 Volts[3] |
| Impedance range | — | 1 mOhm to 1 TOhm[3] |
| AC test fixture | — | MFITF can be mounted on the MFIA for rapid testing of wire-bonded surface-mounted devices[3] |
| AC software | — | LabOne software for PC-based GUI instrument control[3] |
| Maximum wafer size compatibility | — | up to 6 inch[3] |
| Number of independent terminals | — | maximum 4 plus additional chuck grounding[3] |
| DC voltage range | — | +/-40 Volts[3] |
| DC current range | — | +/-100 mA[3] |
| SMU measurement resolution | — | 10 femtoamp and 0.2 microvolt[3] |
| AC signal frequency range | — | DC to 5 MHz[3] |
| AC signal voltage range | — | 0 to 2.1 V RMS[3] |
| DC bias range (2 probes) | — | +/-10 Volts[3] |
| DC bias range (4 probes) | — | +/-3 Volts[3] |
| Impedance range (AC) | — | 1 mOhm to 1 TOhm[3] |
| Probe micro-positioner model | — | MPI PM100[3] |
| Probe tip material | — | tungsten carbide (W)[3] |
| Type | — | Probe station[3] |
| Use | — | Electrical testing on wafers or chips[3] |
| Maximum wafer size | — | up to 6 inch[3] |
| Independent terminals | — | maximum of 4 independent terminals + additional chuck grounding[3] |
| Probe positioning | — | Three-axis movement of the probe tips with manual micro-manipulators[3] |
| Chuck travel range | — | 150 mm x 150 mm coarse and 10 mm x 10 mm fine X-Y travel range[3] |
| Max independent terminals | — | 4 plus additional chuck grounding[3] |
| DC measurement voltage | — | +/- 40 Volts[3] |
| DC measurement current | — | +/- 100 mA[3] |
| DC measurement resolution (current) | — | 10 femtoamp[3] |
| DC measurement resolution (voltage) | — | 0.2 microvolt[3] |
| AC DC bias (2 probes) | — | +/- 10 Volts[3] |
| AC DC bias (4 probes) | — | +/- 3 Volts[3] |
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