Comparison ledger
KLA 1007, KLA RS 75 TCA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | RS 75 TCAKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | KLA RS 75 |
| Specifications | ||
| Manufacturer | KLA[1] | KLA[3] |
| Model | 1007[1] | RS 75 TCA[4] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 6 inch, 8 inch[3] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | 1999-3[6] |
| Make | KLA[2] | KLA[4] |
| Equipment type | Prober[2] | Resistivity system[3] |
| Voltage | — | 115 V[3] |
| Configuration | — | 1.8K Watts[4] |
| Power | — | 115 V, 1.8K Watts, 50/60 Hz[4] |
| Frequency | — | 50/60 Hz[3] |
| Wafer handling | — | 3 H type loader[3] |
| Type | — | Four Point Probe (4PP)[6] |
| Tool type | — | Four-point probe (4PP)[6] |
| Category | — | Test & Probe[3] |
| Probe head / loading | — | 3 H type loader[3] |
| Wafer handler | — | 100 mm to 200 mm dual-cassette wafer handler[6] |
| Flat finder | — | Included[3] |
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