Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Quanta 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 200Thermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Quanta |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | 15 A[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Peltier stage | — | –25 to +55 °C[4] |
| Hot-Stages(2) | — | max temperature 1000 °C, 1500 °C[4] |
| Manufacturer | — | Thermo Fisher Scientific / FEI[4] |
| Model | — | Quanta 200[4] |
| Tool type | — | Scanning electron microscope[4] |
| Power | — | 15 A[4] |
| Electrical | — | 50/60 Hz; 210-240 V[4] |
| Electron detector modes | — | LFD secondary electrons; GSED secondary electrons; GBSD secondary electrons; GBSD back-scattered electrons[4] |
| Stage | — | Peltier stage: –25 to +55 °C[4] |
| Hot stages | — | 2; maximum temperature 1000 °C and 1500 °C[4] |
| EDS detector | — | Oxford INCA-350 X-ray EDS detector[4] |
| Computers | — | 2 PCs[4] |
| Storage | — | Hard Disk Drives (HDDs)[4] |
| Known issue | — | The secondary electron detector is currently non-functional.[4] |
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