Comparison ledger
Hitachi S 9260 CD-SEM, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9260 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9260 | KLA 0035235-003 MMD Head |
| Specifications | ||
| Configuration | Missing parts:[1] | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Manufacturer | Hitachi[2] | — |
| Model | S 9260[2] | 0035235-003[3] |
| Tool type | Critical Dimension Scanning Electron Microscope (CD-SEM)[2] | — |
| Asset number | 70790[1] | — |
| Last confirm date | April 20, 2023[1] | — |
| Vintage | 2006[1] | — |
| Missing parts | TMP + controllers, HV controller, robot controller[1] | — |
| Make | — | KLA[3] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Compatible System | — | KLA AIT-XP[3] |
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