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1305 BSG 3versusNS 300

Hitachi 1305 BSG 3, Tokyo Electron NS 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
NS 300Tokyo Electron
OEMHitachiTokyo Electron
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Tokyo Electron NS 300
Specifications
Vintage (example unit)—2006[1]
Model—NS 300[5]
Make—Tel (Tokyo Electron)[5]
Equipment Type—Scrubber[5]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing