Waferpedia

Comparison ledger

EPX 180 NE High Vacuum TurboversusEPX 500 NE Dry

Edwards EPX 180 NE High Vacuum Turbo, Edwards EPX 500 NE Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMEdwardsEdwards
Category—Lab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEdwards EPXEdwards EPX
Specifications
Configuration200 / 208V[1]200/208 Volts[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing