Waferpedia

Comparison ledger

3220versusDAD641

Disco 3220, Disco DAD641, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
DAD641Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DAD641
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Tool type—Dicing saw[3]
Location—Backend Lab[3]
Tool name—Disco DAD641[4]
Blade thickness options—0.250 mm and 0.090 mm[5]
Tape thickness options—130 μm (blue tape) and 160 μm (UV tape)[5]
Substrate dicing capability—5×5 mm2 pieces[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]nanofab.utah.edunanofab.utah.edu
  4. [4]nanofab.utah.edunanofab.utah.edu
  5. [5]nanofab.utah.edunanofab.utah.edu
  6. [6]arxiv.orgarxiv.org