Comparison ledger
CEE 200 Bake Plate, YES 450PB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 450PBYES | |
|---|---|---|
| OEM | CEE | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 200 | YES 450PB |
| Cited variants | — |
|
| Specifications | ||
| Wafer size | up to 200mm wafer[2] | 200 mm wafers[1] |
| Software | Internal OS[2] | — |
| Voltage | 208V[2] | — |
| Wafer Size | up to 200 mm[3] | — |
| Maximum Temperature | 300 °C[3] | — |
| Bake Methods | Hard contact, Proximity (lift 25-100 μm using N2)[3] | — |
| Exhaust Cover | Yes (removal of fume)[3] | — |
| Smart Pins for Temperature Control | Yes[3] | — |
| Series type | — | MEMS high vacuum cure ovens[1] |
| Maximum process temperature | — | Up to 450°C[1] |
| High vacuum | — | 10-6[1] |
| Pressure range | — | 50-500 Torr[4] |
| Laminar flow pressure range | — | 0.50-500 Torr[4] |
| Process gases | — | Up to four process gases[4] |
| Cooling package | — | Air-only cooling package; no water[1] |
| Cassette construction | — | 316L SST welded, electro-polished construction with no screws or fasteners[5] |
| Cassette temperature suitability | — | 316L SST suitable up to 760°C; recommended continuous operating temperature without distortion is 500°C[5] |
| Cassette sizes | — | 25-wafer cassettes: 2 inch, 3 inch, 100mm, 125mm, 150mm, 150mm short, 200mm, 200mm short, 300mm, and 300mm load port; 13-wafer cassettes: 300 mm and 300mm load port[5] |
| Equipment type | — | High vacuum cure oven series[1] |
| Maximum operating temperature | — | up to 450°C[1] |
| Laminar flow | — | vertical laminar airflow[1] |
| High vacuum variant | — | YES-450PB-HV[1] |
| High vacuum level | — | 10-6 Torr[1] |
| Cassette material | — | 316L stainless steel, welded and electro-polished construction[5] |
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