Waferpedia

Comparison ledger

1000 Hot PlateversusLAD 1 42

CEE 1000 Hot Plate, Despatch LAD 1 42, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LAD 1 42Despatch
OEMCEEDespatch
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateDespatch LAD 1 42
Specifications
Configuration4"[1]Brown oven[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Equipment type—Oven[2]
Description—Brown oven[2]
High temperature—400C[2]
Atmosphere—N2 overflow[2]
Maximum temperature—425C max[2]
Series—LAD series[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]web.archive.orgweb.archive.org