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100 SpinversusConcept Three Gamma 2130 Photoresist Stripper

CEE 100 Spin, Lam Research Concept Three Gamma 2130 Photoresist Stripper, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
100 SpinCEE
Concept Three Gamma 2130 Photoresist StripperLam Research
OEMCEELam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Lam Research Concept Three Gamma 2130 Photoresist Stripper
Specifications
ConfigurationVolts 115[1]—
Make—Lam / Novellus[2]
Model—Concept Three Gamma 2130[2]
Equipment type—Photoresist Stripper[2]
Vintage—2005[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing