Waferpedia

Comparison ledger

Ecomat 250versus120 Continuous

Buehler Ecomat 250, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomat 250Buehler
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomat 250Lapmaster 120 Continuous
Specifications
ConfigurationPolisher / Grinder[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing