Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group IQ Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | IQ MaskEV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices. |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group IQ Mask |
| Specifications | ||
| Configuration | — | Dual end effector robot handling configuration.[1] |
| Reinforced stage drives | — | X/Y/Theta axis Internal wedge compensation unit: Automatic wedge compensation Substrate and mask.[1] |
| Power | — | 500W or 1000W Hg lamps house Optical sets:[1] |
| Wafer size | — | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.[1] |
| OEM | — | EV Group[1] |
| Model | — | IQ Mask[1] |
| Category | — | Lithography[2] |
| Handling configuration | — | Dual end effector robot handling configuration[1] |
| Alignment stage | — | Motorized alignment stage with precision guided X, Y, T alignment[1] |
| Wedge compensation | — | Automatic wedge compensation[1] |
| Optics / lamps | — | 500W or 1000W Hg lamps house optical sets[1] |
| Microscope | — | Fully motorized split field microscope with high resolution CCD camera[1] |
| Bottom side microscope | — | Fully motorized split field microscope for bottom side viewing with high resolution CCD camera[1] |
| Control | — | Complete computer control for operator interface and alignment functions[1] |
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