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017-0146-01 PrealignerversusFPA 3000 EX 4

Brooks 017-0146-01 Prealigner, Canon FPA 3000 EX 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
FPA 3000 EX 4Canon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerCanon FPA 3000
Specifications
Configuration—Main body only[1]
OEM—Canon[1]
Model—FPA 3000 EX 4[1]
Equipment type—Stepper[1]
Wafer size—8 inch[3]
Exposure source—KrF[3]
Resolution—250nm[3]
Type—Stepper[3]
Light source—KrF excimer laser[3]
017-0146-01 Prealigner entryFPA 3000 EX 4 entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing